Synthesis of lead-free Ba0.85Ca0.15Zr0.1Ti0.9O3 thin films by the chelate route

A chemical solution deposition route based on the chelate approach is developed for the synthesis of Ba 0.85 Ca 0.15 Zr 0.1 Ti 0.9 O 3 thin films. This lead-free composition is regarded as one of the most promising for the replacement of Pb(Zr x Ti 1−x )O 3 in practical applications. The synthesis method replaces the highly toxic 2-methoxyethanol route, and offers the advantage of a simple and rapid preparation process. Homogeneous and crack-free thin films with thicknesses of 290 and 490 nm were prepared. Films annealed between 700 and 900 °C develop a single-phase perovskite structure. The electrical properties exhibit a weak frequency dependence for the dielectric constant, low dielectric loss, and ferroelectric behavior. Highlights A chelate route is developed for the synthesis of Ba 0.85 Ca 0.15 Zr 0.1 Ti 0.9 O 3 thin films. The route involves a rapid, simple and non-toxic reaction method. A well-developed perovskite structure is obtained for films annealed above 700 °C. The lead-free piezoelectric films exhibit good dielectric and ferroelectric properties.