Temperature‐induced changes of the electrical and mechanical properties of aerosol‐deposited BaTiO3 thick films for energy storage applications

Aerosol deposition (AD) is a room‐temperature film deposition method for the fabrication of scalable ferroelectric ceramic films on different substrates, which is particularly appealing for thick film energy storage applications. However, the electrical and mechanical properties of AD ferroelectric films are not yet satisfactorily understood. Here, we report the dielectric, energy storage, and mechanical properties of aerosol‐deposited BaTiO3 (AD‐BT) thick films with nanosized grains by combining macroscopic electric measurements with indentation tests. We find that thermal annealing is an effective way to improve dielectric permittivity and polarization of the AD‐BT film, as well as to increase the hardness and Young's modulus of the film. However, crack formation in the annealed AD‐BT film is promoted in comparison to the as‐processed sample, suggesting that the interplay between the nanosized grains and release of the internal stress during annealing may have major consequences for the mechanical properties and hence should be taken into consideration in application.