3D arrangement of epitaxial graphene conformally grown on porousified crystalline SiC

Nanoporous materials represent a versatile solution for a number of applications ranging from sensing, energy applications, catalysis, drug delivery, and many others. The synergy between the outstanding properties of graphene with a three-dimensional porous structure, circumventing the limits of its 2D nature, constitutes therefore a breakthrough for many fields. We report the first three-dimensional growth of epitaxial graphene on a porousified crystalline 4H–SiC(0001). The wafer porosification is performed via a sequence of metal-assisted photochemical and photoelectrochemical etching in hydrofluoric acid based electrolytes. Pore dimensions of the matrix have been evaluated by electron tomography resulting in an average diameter of 180 nm. Graphene growth is performed in an ultra high vacuum environment at a base pressure of 10−11 mbar. The graphene growth inside the pores is uniform as confirmed by Transmission Electron Microscopy (TEM) analysis. Raman spectroscopy confirms the high quality of the graphene with a 2D/G intensity ratio >1 and an average graphene crystal size of ≈ 100 nm. Furthermore, it demonstrates a uniform coverage of graphene across the whole sample area accessible to the Raman probe. The surface-to-volume ratio of this novel material, its properties, the tunability of the pore size and the scalability of the surface porosification process offer a game changing perspective for a large number of applications. High quality 3D epitaxial graphene was grown on a porousified crystalline 4H–SiC substrate, and it covers the whole SiC scaffold as demonstrated by Raman and TEM analysis. The 2D quality and 3D structure of this graphene material offers a game changing perspective for applications. [Display omitted] •Native 3D epitaxial graphene with high quality.•Realized in nano-porous crystalline 4H–SiC(0001) backbone.•Tunable pores dimension via photo(electro)chemical etching.•(HAADF-STEM) 3-D characterization of graphene in the porous structure.•Raman analysis of graphene.