Tunable resonance frequency of NiFe thin films by oblique deposition

•Oblique deposition can vary surface morphology of NiFe films.•Large inclination angle produce strongly magnetic anisotropy of NiFe films.•Oblique deposition plays a significant role in tuning resonance frequency of magnetic films. The soft magnetic metal films own potential applications for high frequency magnetic devices. The operating frequency and reliability of the devices depend on the saturation magnetization and resonance frequency of metal films. Increasing the application frequency of the magnetic thin film is extremely challenging. Herein, we deposited a series of NiFe films using electron beam evaporation with various inclination angles, and investigated the surface morphology and magnetic properties, respectively. This paper presents the relationship between surface morphology and inclination angle.