Elemental and Structural Mapping of Czochralski-Grown Bulk (AlxGa1 –x)2O3 Crystals

The aluminum distribution in the surface layer of an (Al x Ga 1 – x ) 2 O 3 crystal grown on a sapphire seed by the Czochralski method has been studied using X-ray fluorescence and X-ray diffraction mapping and scanning electron microscopy. It is shown that the aluminum distribution correlates with...

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Veröffentlicht in:Technical physics letters 2021-03, Vol.47 (3), p.218-221
Hauptverfasser: Bauman, D. A., P’yankova, L. A., Kremleva, A. V., Spiridonov, V. A., Panov, D. Yu, Zakgeim, D. A., Bakhvalov, A. S., Odnoblyudov, M. A., Romanov, A. E., Bugrov, V. E.
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container_end_page 221
container_issue 3
container_start_page 218
container_title Technical physics letters
container_volume 47
creator Bauman, D. A.
P’yankova, L. A.
Kremleva, A. V.
Spiridonov, V. A.
Panov, D. Yu
Zakgeim, D. A.
Bakhvalov, A. S.
Odnoblyudov, M. A.
Romanov, A. E.
Bugrov, V. E.
description The aluminum distribution in the surface layer of an (Al x Ga 1 – x ) 2 O 3 crystal grown on a sapphire seed by the Czochralski method has been studied using X-ray fluorescence and X-ray diffraction mapping and scanning electron microscopy. It is shown that the aluminum distribution correlates with a change in the physical broadening of the diffraction maxima of the ( h 00) plane system of the crystal and is related to a distance from the seeding zone.
doi_str_mv 10.1134/S1063785021030044
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subjects Aluminum
Classical and Continuum Physics
Crystal growth
Crystal structure
Crystals
Czochralski method
Mapping
Physics
Physics and Astronomy
Sapphire
Surface layers
X-ray fluorescence
title Elemental and Structural Mapping of Czochralski-Grown Bulk (AlxGa1 –x)2O3 Crystals
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