Preparation of MoO3 Thin Films by Spray Pyrolysis and its Gas Sensing Performance

MoO thin films have been prepared by a simple spray pyrolysis technique at substrate temperature 250°c. The structure and morphology of thin films are characterized by X-ray powder diffraction (XRD), scanning electron microscopy and UV-vis spectroscopy. The gas sensing properties of MoO thin film is studied at gas concentration 400 ppm and working temperature of 100–400 °c. It was found that the sensitivity depended on the working temperatures and also H S gas concentration. The results show that the MoO thin film can be used to fabricate high performance H S gas sensors.