Technique for Analyzing Volumetric Defects Using Digital Elevation Model of a Surface

A technique for detecting and analyzing volumetric surface defects has been developed. The technique is based on geomorphometric modeling, in particular, on analyzing the models and maps of a number of morphometric variables (minimum curvature, maximum curvature, mean curvature, Gaussian curvature,...

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Veröffentlicht in:	Russian journal of nondestructive testing 2021-11, Vol.57 (11), p.1000-1007
Hauptverfasser:	Dedkova, A. A., Florinsky, I. V., Gusev, E. E., Dyuzhev, N. A., Fomichev, M. Yu, Shtern, M. Yu
Format:	Artikel
Sprache:	eng
Schlagworte:	Characterization and Evaluation of Materials Chemistry and Materials Science Curvature Digital Elevation Models Geomorphology Materials Science Optical Methods Quality control Silicon Silicon wafers Structural Materials Surface defects
Online-Zugang:	Volltext
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