Transformation of the Electron Energy Distribution Function near a Rectangular Hollow Cathode

Using the improved method of single Langmuir probes, the electron energy distribution functions (EEDF) are obtained in a short (10 mm) discharge gap between a rectangular hollow cathode and a mesh anode. It was found that the electron distributions are not Maxwellian with an excess of high-energy el...

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Veröffentlicht in:Physics of atomic nuclei 2021-12, Vol.84 (10), p.1757-1760
Hauptverfasser: Andreev, S. N., Bernatskiy, A. V., Ochkin, V. N.
Format: Artikel
Sprache:eng
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Zusammenfassung:Using the improved method of single Langmuir probes, the electron energy distribution functions (EEDF) are obtained in a short (10 mm) discharge gap between a rectangular hollow cathode and a mesh anode. It was found that the electron distributions are not Maxwellian with an excess of high-energy electrons (10–20 eV), the proportion of which decreases with distance from the cathode. The features are associated with the nonlocal mechanism of the EEDF formation.
ISSN:1063-7788
1562-692X
DOI:10.1134/S1063778821090039