Transformation of the Electron Energy Distribution Function near a Rectangular Hollow Cathode
Using the improved method of single Langmuir probes, the electron energy distribution functions (EEDF) are obtained in a short (10 mm) discharge gap between a rectangular hollow cathode and a mesh anode. It was found that the electron distributions are not Maxwellian with an excess of high-energy el...
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Veröffentlicht in: | Physics of atomic nuclei 2021-12, Vol.84 (10), p.1757-1760 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Using the improved method of single Langmuir probes, the electron energy distribution functions (EEDF) are obtained in a short (10 mm) discharge gap between a rectangular hollow cathode and a mesh anode. It was found that the electron distributions are not Maxwellian with an excess of high-energy electrons (10–20 eV), the proportion of which decreases with distance from the cathode. The features are associated with the nonlocal mechanism of the EEDF formation. |
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ISSN: | 1063-7788 1562-692X |
DOI: | 10.1134/S1063778821090039 |