Accurate Phase Change Behavior Characterization Of Ultrathin Sb-Rich Films Based On Superlattice-like Al/Ge10Sb90 System

Sb-rich films, such as Ge 10 Sb 90 , having ultra-fast phase change speed are promising chalcogenide materials for phase change memory (PCM) applications. However, it is difficult to accurately observe the phase change properties of ultrathin Sb-rich films due to their volatilization at higher tempe...

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Veröffentlicht in:	Journal of electronic materials 2022, Vol.51 (1), p.190-195
Hauptverfasser:	Xue, Jianzhong, Sui, Yongxing, Zhu, Xiaoqin, Zhang, Jianhao, Wu, Weihua, Zou, Hua
Format:	Artikel
Sprache:	eng
Schlagworte:	Characterization and Evaluation of Materials Chemistry and Materials Science Crystallization Electronics and Microelectronics Instrumentation Materials Science Operating temperature Optical and Electronic Materials Original Research Article Solid State Physics Superlattices Surface roughness Temperature Thermal energy Thickness ratio Vaporization
Online-Zugang:	Volltext
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