Deep-Learning Based Autofocus Score Prediction of Scanning Electron Microscope

Deep-Learning Based Autofocus Score Prediction of Scanning Electron Microscope

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Veröffentlicht in:Microscopy and microanalysis 2019-08, Vol.25 (S2), p.182-183
Hauptverfasser: Kim, Huisoo, Oh, Moohyun, Lee, Heerang, Jang, Jonggyu, Kim, Myeung Un, Yang, Hyun Jong, Ryoo, Michael, Lee, Junhee
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Sprache:eng
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Analytical and Instrumentation Science Symposia
Data Acquisition Schemes, Machine Learning Algorithms, and Open Source Software Development for Electron Microscopy
Deep learning
Scanning electron microscopy
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container_end_page 183
container_issue S2
container_start_page 182
container_title Microscopy and microanalysis
container_volume 25
creator Kim, Huisoo
Oh, Moohyun
Lee, Heerang
Jang, Jonggyu
Kim, Myeung Un
Yang, Hyun Jong
Ryoo, Michael
Lee, Junhee
description
doi_str_mv 10.1017/S1431927619001648
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source Cambridge University Press Journals Complete
subjects Analytical and Instrumentation Science Symposia
Data Acquisition Schemes, Machine Learning Algorithms, and Open Source Software Development for Electron Microscopy
Deep learning
Scanning electron microscopy
title Deep-Learning Based Autofocus Score Prediction of Scanning Electron Microscope
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