Calibration of a Scanning Electron Microscope: 2. Methods of Signal Processing

— The influence of the processing of scanning electron microscope (SEM) images on its calibration using test objects with a trapezoidal profile and large inclination angles of the side walls is considered. The influence of different methods of the linearization of SEM signals on the calibration accuracy is shown. Two methods of SEM calibration are presented and the best method is selected. The advantage of correlation analysis for SEM calibration is demonstrated. It is shown that only the use of a virtual scanning electron microscope (VSEM) guarantees correct calibration of the SEM.