Light Transmission and Surface Topography of KU-1 Optical Quartz After Sputtering and Cleaning from Al Films in RF Discharge of H2(D2)–Ne Mixtures

In plasma devices, in which plasma–wall interaction and material migration are significant, the diagnostic-window transmission may decrease due to the contamination of plasma-cleaning components by sputtered materials. We discuss the cleaning of KU-1 fused silica, which simulates the diagnostic wind...

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Veröffentlicht in:	Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2021-09, Vol.15 (5), p.1029-1038
Hauptverfasser:	Gorodetsky, A. E., Markin, A. V., Bukhovets, V. L., Zolotarevsky, V. I., Zalavutdinov, R. Kh, Babinov, N. A., Dmitriev, A. M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Atomic force microscopy Chemical composition Chemistry and Materials Science Cleaning Diagnostic systems Fused silica Hydrogen isotopes Light transmission Materials Science Morphology Neon Photoelectrons Plasma Quartz Silicon dioxide Spectrum analysis Sputtering Surfaces and Interfaces Thickness Thin Films
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