A synchrotron-based kilowatt-level radiation source for EUV lithograph
A compact damping ring with limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. R...
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| Veröffentlicht in: | arXiv.org 2021-10 |
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| creator | Jiang, Bocheng Chao, Feng Li, Changliang Bai, Zhenghe Wan, Weishi Dao Xiang Gu, Qiang Wang, Kun Zhang, Qinglei Huang, Dazhang Chen, Senyu |
| description | A compact damping ring with limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. Rep. 7, 4724 (2017)]. Coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies. |
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The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. Rep. 7, 4724 (2017)]. Coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.</description><identifier>EISSN: 2331-8422</identifier><language>eng</language><publisher>Ithaca: Cornell University Library, arXiv.org</publisher><subject>Coherent radiation ; Damping ; Synchrotrons</subject><ispartof>arXiv.org, 2021-10</ispartof><rights>2021. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). 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| subjects | Coherent radiation Damping Synchrotrons |
| title | A synchrotron-based kilowatt-level radiation source for EUV lithograph |
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