A synchrotron-based kilowatt-level radiation source for EUV lithograph

A synchrotron-based kilowatt-level radiation source for EUV lithograph

A compact damping ring with limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. R...

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Veröffentlicht in:arXiv.org 2021-10
Hauptverfasser: Jiang, Bocheng, Chao, Feng, Li, Changliang, Bai, Zhenghe, Wan, Weishi, Dao Xiang, Gu, Qiang, Wang, Kun, Zhang, Qinglei, Huang, Dazhang, Chen, Senyu
Format: Artikel
Sprache:eng
Schlagworte:
Coherent radiation
Damping
Synchrotrons
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Zusammenfassung:A compact damping ring with limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. Rep. 7, 4724 (2017)]. Coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.
ISSN:2331-8422