High‐Quality Bulk β‐Ga2O3 and β‐(AlxGa1−x)2O3 Crystals: Growth and Properties

A method for the growth of high‐quality gallium oxide (β‐Ga2O3) bulk crystals from the melt is developed. The influence of the atmosphere in the process zone on the stability of growth and the quality of Czochralski grown crystals is studied. The structural properties of the crystals obtained are in...

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Veröffentlicht in:Physica status solidi. A, Applications and materials science Applications and materials science, 2021-10, Vol.218 (20), p.n/a
Hauptverfasser: Bauman, Dmitrii A., Panov, Dmitrii Iu, Zakgeim, Dmitrii A., Spiridonov, Vladislav A., Kremleva, Arina V., Petrenko, Artem A., Brunkov, Pavel N., Prasolov, Nikita D., Nashchekin, Alexey V., Smirnov, Andrei M., Odnoblyudov, Maxim A., Bougrov, Vladislav E., Romanov, Alexey E.
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container_issue 20
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container_title Physica status solidi. A, Applications and materials science
container_volume 218
creator Bauman, Dmitrii A.
Panov, Dmitrii Iu
Zakgeim, Dmitrii A.
Spiridonov, Vladislav A.
Kremleva, Arina V.
Petrenko, Artem A.
Brunkov, Pavel N.
Prasolov, Nikita D.
Nashchekin, Alexey V.
Smirnov, Andrei M.
Odnoblyudov, Maxim A.
Bougrov, Vladislav E.
Romanov, Alexey E.
description A method for the growth of high‐quality gallium oxide (β‐Ga2O3) bulk crystals from the melt is developed. The influence of the atmosphere in the process zone on the stability of growth and the quality of Czochralski grown crystals is studied. The structural properties of the crystals obtained are investigated. Samples of gallium oxide substrates are demonstrated. The possibility of growing bulk crystals of solid‐solution oxides (AlxGa1–x)2O3 is tested. Power electronics device performance improving is possible through the utilization of advanced materials, the most promising of which are β‐Ga2O3 and β‐(AlxGa1–x)2O3. Herein, the results of the development of technology for obtaining high‐quality β‐Ga2O3 crystals for substrates formation and further device design are presented.
doi_str_mv 10.1002/pssa.202100335
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fullrecord <record><control><sourceid>proquest_wiley</sourceid><recordid>TN_cdi_proquest_journals_2583083366</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2583083366</sourcerecordid><originalsourceid>FETCH-LOGICAL-p1485-8f71123134b8e6e0543e8b6786c491a4c2fd43a6350efd3c05061f639c90d7be3</originalsourceid><addsrcrecordid>eNo9kLFOwzAURS0EEqWwMkdigSHF9nMch61EkCJValFBjJabODQlNMFO1GZjZER8Ch_CR_RLSCnq9N599-hd6SJ0SnCPYEwvS2tVj2LaCgBvD3WI4NTlQIL93Y7xITqydo4x85hPOuhpkD3P1u-f97XKs6pxruv8xfn5bi-RoiNw1CLZyvN-vooUWX98rS42RmgaW6ncXjmRKZbV7I8cm6LUpsq0PUYHaevqk__ZRY-3Nw_hwB2OoruwP3RLwoTnitQnhAIBNhWaa-wx0GLKfcFjFhDFYpomDBQHD-s0gRh7mJOUQxAHOPGnGrrobPu3NMVbrW0l50VtFm2kpJ4ALAA4b6lgSy2zXDeyNNmrMo0kWG6ak5vm5K45OZ5M-jsFv8peZvw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2583083366</pqid></control><display><type>article</type><title>High‐Quality Bulk β‐Ga2O3 and β‐(AlxGa1−x)2O3 Crystals: Growth and Properties</title><source>Wiley-Blackwell Journals</source><creator>Bauman, Dmitrii A. ; Panov, Dmitrii Iu ; Zakgeim, Dmitrii A. ; Spiridonov, Vladislav A. ; Kremleva, Arina V. ; Petrenko, Artem A. ; Brunkov, Pavel N. ; Prasolov, Nikita D. ; Nashchekin, Alexey V. ; Smirnov, Andrei M. ; Odnoblyudov, Maxim A. ; Bougrov, Vladislav E. ; Romanov, Alexey E.</creator><creatorcontrib>Bauman, Dmitrii A. ; Panov, Dmitrii Iu ; Zakgeim, Dmitrii A. ; Spiridonov, Vladislav A. ; Kremleva, Arina V. ; Petrenko, Artem A. ; Brunkov, Pavel N. ; Prasolov, Nikita D. ; Nashchekin, Alexey V. ; Smirnov, Andrei M. ; Odnoblyudov, Maxim A. ; Bougrov, Vladislav E. ; Romanov, Alexey E.</creatorcontrib><description>A method for the growth of high‐quality gallium oxide (β‐Ga2O3) bulk crystals from the melt is developed. The influence of the atmosphere in the process zone on the stability of growth and the quality of Czochralski grown crystals is studied. The structural properties of the crystals obtained are investigated. Samples of gallium oxide substrates are demonstrated. The possibility of growing bulk crystals of solid‐solution oxides (AlxGa1–x)2O3 is tested. Power electronics device performance improving is possible through the utilization of advanced materials, the most promising of which are β‐Ga2O3 and β‐(AlxGa1–x)2O3. Herein, the results of the development of technology for obtaining high‐quality β‐Ga2O3 crystals for substrates formation and further device design are presented.</description><identifier>ISSN: 1862-6300</identifier><identifier>EISSN: 1862-6319</identifier><identifier>DOI: 10.1002/pssa.202100335</identifier><language>eng</language><publisher>Weinheim: Wiley Subscription Services, Inc</publisher><subject>Crystal growth ; Crystal structure ; Czochralski method ; gallium oxide ; Gallium oxides ; power electronics ; Substrates</subject><ispartof>Physica status solidi. A, Applications and materials science, 2021-10, Vol.218 (20), p.n/a</ispartof><rights>2021 Wiley‐VCH GmbH</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><orcidid>0000-0003-3738-408X ; 0000-0002-3400-4654 ; 0000-0002-7045-0918 ; 0000-0002-7862-971X</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fpssa.202100335$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fpssa.202100335$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>314,776,780,1411,27901,27902,45550,45551</link.rule.ids></links><search><creatorcontrib>Bauman, Dmitrii A.</creatorcontrib><creatorcontrib>Panov, Dmitrii Iu</creatorcontrib><creatorcontrib>Zakgeim, Dmitrii A.</creatorcontrib><creatorcontrib>Spiridonov, Vladislav A.</creatorcontrib><creatorcontrib>Kremleva, Arina V.</creatorcontrib><creatorcontrib>Petrenko, Artem A.</creatorcontrib><creatorcontrib>Brunkov, Pavel N.</creatorcontrib><creatorcontrib>Prasolov, Nikita D.</creatorcontrib><creatorcontrib>Nashchekin, Alexey V.</creatorcontrib><creatorcontrib>Smirnov, Andrei M.</creatorcontrib><creatorcontrib>Odnoblyudov, Maxim A.</creatorcontrib><creatorcontrib>Bougrov, Vladislav E.</creatorcontrib><creatorcontrib>Romanov, Alexey E.</creatorcontrib><title>High‐Quality Bulk β‐Ga2O3 and β‐(AlxGa1−x)2O3 Crystals: Growth and Properties</title><title>Physica status solidi. A, Applications and materials science</title><description>A method for the growth of high‐quality gallium oxide (β‐Ga2O3) bulk crystals from the melt is developed. The influence of the atmosphere in the process zone on the stability of growth and the quality of Czochralski grown crystals is studied. The structural properties of the crystals obtained are investigated. Samples of gallium oxide substrates are demonstrated. The possibility of growing bulk crystals of solid‐solution oxides (AlxGa1–x)2O3 is tested. Power electronics device performance improving is possible through the utilization of advanced materials, the most promising of which are β‐Ga2O3 and β‐(AlxGa1–x)2O3. Herein, the results of the development of technology for obtaining high‐quality β‐Ga2O3 crystals for substrates formation and further device design are presented.</description><subject>Crystal growth</subject><subject>Crystal structure</subject><subject>Czochralski method</subject><subject>gallium oxide</subject><subject>Gallium oxides</subject><subject>power electronics</subject><subject>Substrates</subject><issn>1862-6300</issn><issn>1862-6319</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><recordid>eNo9kLFOwzAURS0EEqWwMkdigSHF9nMch61EkCJValFBjJabODQlNMFO1GZjZER8Ch_CR_RLSCnq9N599-hd6SJ0SnCPYEwvS2tVj2LaCgBvD3WI4NTlQIL93Y7xITqydo4x85hPOuhpkD3P1u-f97XKs6pxruv8xfn5bi-RoiNw1CLZyvN-vooUWX98rS42RmgaW6ncXjmRKZbV7I8cm6LUpsq0PUYHaevqk__ZRY-3Nw_hwB2OoruwP3RLwoTnitQnhAIBNhWaa-wx0GLKfcFjFhDFYpomDBQHD-s0gRh7mJOUQxAHOPGnGrrobPu3NMVbrW0l50VtFm2kpJ4ALAA4b6lgSy2zXDeyNNmrMo0kWG6ak5vm5K45OZ5M-jsFv8peZvw</recordid><startdate>202110</startdate><enddate>202110</enddate><creator>Bauman, Dmitrii A.</creator><creator>Panov, Dmitrii Iu</creator><creator>Zakgeim, Dmitrii A.</creator><creator>Spiridonov, Vladislav A.</creator><creator>Kremleva, Arina V.</creator><creator>Petrenko, Artem A.</creator><creator>Brunkov, Pavel N.</creator><creator>Prasolov, Nikita D.</creator><creator>Nashchekin, Alexey V.</creator><creator>Smirnov, Andrei M.</creator><creator>Odnoblyudov, Maxim A.</creator><creator>Bougrov, Vladislav E.</creator><creator>Romanov, Alexey E.</creator><general>Wiley Subscription Services, Inc</general><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-3738-408X</orcidid><orcidid>https://orcid.org/0000-0002-3400-4654</orcidid><orcidid>https://orcid.org/0000-0002-7045-0918</orcidid><orcidid>https://orcid.org/0000-0002-7862-971X</orcidid></search><sort><creationdate>202110</creationdate><title>High‐Quality Bulk β‐Ga2O3 and β‐(AlxGa1−x)2O3 Crystals: Growth and Properties</title><author>Bauman, Dmitrii A. ; Panov, Dmitrii Iu ; Zakgeim, Dmitrii A. ; Spiridonov, Vladislav A. ; Kremleva, Arina V. ; Petrenko, Artem A. ; Brunkov, Pavel N. ; Prasolov, Nikita D. ; Nashchekin, Alexey V. ; Smirnov, Andrei M. ; Odnoblyudov, Maxim A. ; Bougrov, Vladislav E. ; Romanov, Alexey E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p1485-8f71123134b8e6e0543e8b6786c491a4c2fd43a6350efd3c05061f639c90d7be3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Crystal growth</topic><topic>Crystal structure</topic><topic>Czochralski method</topic><topic>gallium oxide</topic><topic>Gallium oxides</topic><topic>power electronics</topic><topic>Substrates</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bauman, Dmitrii A.</creatorcontrib><creatorcontrib>Panov, Dmitrii Iu</creatorcontrib><creatorcontrib>Zakgeim, Dmitrii A.</creatorcontrib><creatorcontrib>Spiridonov, Vladislav A.</creatorcontrib><creatorcontrib>Kremleva, Arina V.</creatorcontrib><creatorcontrib>Petrenko, Artem A.</creatorcontrib><creatorcontrib>Brunkov, Pavel N.</creatorcontrib><creatorcontrib>Prasolov, Nikita D.</creatorcontrib><creatorcontrib>Nashchekin, Alexey V.</creatorcontrib><creatorcontrib>Smirnov, Andrei M.</creatorcontrib><creatorcontrib>Odnoblyudov, Maxim A.</creatorcontrib><creatorcontrib>Bougrov, Vladislav E.</creatorcontrib><creatorcontrib>Romanov, Alexey E.</creatorcontrib><collection>Electronics &amp; Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Physica status solidi. A, Applications and materials science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Bauman, Dmitrii A.</au><au>Panov, Dmitrii Iu</au><au>Zakgeim, Dmitrii A.</au><au>Spiridonov, Vladislav A.</au><au>Kremleva, Arina V.</au><au>Petrenko, Artem A.</au><au>Brunkov, Pavel N.</au><au>Prasolov, Nikita D.</au><au>Nashchekin, Alexey V.</au><au>Smirnov, Andrei M.</au><au>Odnoblyudov, Maxim A.</au><au>Bougrov, Vladislav E.</au><au>Romanov, Alexey E.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High‐Quality Bulk β‐Ga2O3 and β‐(AlxGa1−x)2O3 Crystals: Growth and Properties</atitle><jtitle>Physica status solidi. A, Applications and materials science</jtitle><date>2021-10</date><risdate>2021</risdate><volume>218</volume><issue>20</issue><epage>n/a</epage><issn>1862-6300</issn><eissn>1862-6319</eissn><abstract>A method for the growth of high‐quality gallium oxide (β‐Ga2O3) bulk crystals from the melt is developed. The influence of the atmosphere in the process zone on the stability of growth and the quality of Czochralski grown crystals is studied. The structural properties of the crystals obtained are investigated. Samples of gallium oxide substrates are demonstrated. The possibility of growing bulk crystals of solid‐solution oxides (AlxGa1–x)2O3 is tested. Power electronics device performance improving is possible through the utilization of advanced materials, the most promising of which are β‐Ga2O3 and β‐(AlxGa1–x)2O3. Herein, the results of the development of technology for obtaining high‐quality β‐Ga2O3 crystals for substrates formation and further device design are presented.</abstract><cop>Weinheim</cop><pub>Wiley Subscription Services, Inc</pub><doi>10.1002/pssa.202100335</doi><tpages>5</tpages><orcidid>https://orcid.org/0000-0003-3738-408X</orcidid><orcidid>https://orcid.org/0000-0002-3400-4654</orcidid><orcidid>https://orcid.org/0000-0002-7045-0918</orcidid><orcidid>https://orcid.org/0000-0002-7862-971X</orcidid></addata></record>
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source Wiley-Blackwell Journals
subjects Crystal growth
Crystal structure
Czochralski method
gallium oxide
Gallium oxides
power electronics
Substrates
title High‐Quality Bulk β‐Ga2O3 and β‐(AlxGa1−x)2O3 Crystals: Growth and Properties
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T15%3A31%3A45IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_wiley&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=High%E2%80%90Quality%20Bulk%20%CE%B2%E2%80%90Ga2O3%20and%20%CE%B2%E2%80%90(AlxGa1%E2%88%92x)2O3%20Crystals:%20Growth%20and%20Properties&rft.jtitle=Physica%20status%20solidi.%20A,%20Applications%20and%20materials%20science&rft.au=Bauman,%20Dmitrii%20A.&rft.date=2021-10&rft.volume=218&rft.issue=20&rft.epage=n/a&rft.issn=1862-6300&rft.eissn=1862-6319&rft_id=info:doi/10.1002/pssa.202100335&rft_dat=%3Cproquest_wiley%3E2583083366%3C/proquest_wiley%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2583083366&rft_id=info:pmid/&rfr_iscdi=true