F2 excimer laser (157 nm) ablation of polymers: relation of neutral and ionic fragment detection and absorption

F2 excimer laser (157 nm) ablation of polymers: relation of neutral and ionic fragment detection and absorption

The ablation products of various polymers (triazene polymers, polyimides and glycidyl azide polymer) with 157 nm F2 laser irradiation were studied with time-of-flight mass spectroscopy, ion probe and white-light interferometry. In contrast to the ablation with longer UV wavelengths, 157 nm irradiati...

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Veröffentlicht in:Journal of physics. Conference series 2007-04, Vol.59 (1), p.625-631
Hauptverfasser: Kuhnke, M, Cramer, L, Dyer, P E, Dickinson, J T, Lippert, T, Niino, H, Pervolaraki, M, Walton, C D, Wokaun, A
Format: Artikel
Sprache:eng
Schlagworte:
Ablation
Chemical bonds
Excimer lasers
Excimers
Fluence
Glycidyl azide polymer
Interferometry
Ion probes
Irradiation
Kapton (trademark)
Laser ablation
Physics
Polyimide resins
Polymers
White light interferometry
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Zusammenfassung:The ablation products of various polymers (triazene polymers, polyimides and glycidyl azide polymer) with 157 nm F2 laser irradiation were studied with time-of-flight mass spectroscopy, ion probe and white-light interferometry. In contrast to the ablation with longer UV wavelengths, 157 nm irradiation results in non-preferential bond-breaking and a much more pronounced fragmentation into fragments with masses
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/59/1/132