High quality ultrathin NbN layers on sapphire for superconducting single photon detectors

Ultra-thin epitaxial NbN layers are a key component of Superconducting Single Photon infrared Detectors. Efforts devoted to the layer growth aim at improving their critical temperature and critical current density, while keeping their thickness close to 5 nm and Tc above 10 K, which insure a large b...

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Veröffentlicht in:	Journal of physics. Conference series 2008-02, Vol.97 (1), p.012046
Hauptverfasser:	Lamaestre, R Espiau de, Odier, Ph, Bellet-Amalric, E, Cavalier, P, Pouget, S, Villégier, J-C
Format:	Artikel
Sprache:	eng
Schlagworte:	Critical current density Critical temperature Crystallography Diameters Disorientation Film thickness Infrared detectors Magnetron sputtering Niobium nitride Photons Physics Room temperature Sapphire Substrates Superconductivity Thin films Transition temperature Transport properties
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