Liquid as template for next generation micro devices

Liquids have fascinated generations of scientists and engineers. Since ancient Greece, the perfect natural shape of liquids has been used to create optical systems. Nowadays, the natural shape of liquid is used in the fabrication of microlens arrays that rely on the melting of glass or photoresist to generate high quality lenses. However shrinkage normally associated to the liquid to solid phase transition will affect the initial shape and quality of the liquid structure. In this contribution, a novel fabrication technique that enables the encapsulation and replication of liquid templates without affecting their natural shape is presented. The SOLID (SOlid on LIquid Deposition) process [1] allows for a transparent solid film to be deposited and grown onto a liquid template (droplet, film, line) in a way that the liquid shapes the overgrowing solid layer. The resulting configuration of the SOLID devices is chemically and mechanically stable and is the base of a huge variety of new micro-nano systems in the field of microfluidics, biomedical devices and micro-optics among others. The SOLID process enables in a one step process the encapsulation of liquid microlenses, fluidics channels, drug reservoir or any naturally driven liquid structure. The phenomenon and solid-liquid interface resulting from the SOLID process is new and still unexploited. The solid layer used for the SOLID process chosen in this paper is poly-para-xylylene called Parylene, a transparent biocompatible polymer with excellent mechanical and chemical properties. Moreover, as the solid layer is growing over a liquid template, atomically smooth surfaces channels can be obtained [2]. The polymerization of Parylene does not exert stress and does not change the shape of the liquid; this latter aspect is particularly interesting for manufacturing naturally driven liquid structures. In this paper the authors explore the limits of this new method by testing different designs of SOLID encapsulated structures and their potential to deliver next generation micro devices.