Lattice distortions in GaN thin films on (0001) sapphire

Lattice distortions in GaN thin films on (0001) sapphire

The GaN/sapphire microstructure and lattice distortions in GaN were investigated using convergent beam electron diffraction (CBED) and electron backscatter diffraction (EBSD). CBED studies showed small scale (

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Veröffentlicht in:Journal of physics. Conference series 2010-02, Vol.209 (1), p.012022
Hauptverfasser: Rao, D V Sridhara, Beanland, R, Kappers, M J, Zhu, D, Humphreys, C J
Format: Artikel
Sprache:eng
Schlagworte:
Electron backscatter diffraction
Electron diffraction
Electrons
Mosaics
Physics
Sapphire
Thin films
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Beschreibung
Zusammenfassung:The GaN/sapphire microstructure and lattice distortions in GaN were investigated using convergent beam electron diffraction (CBED) and electron backscatter diffraction (EBSD). CBED studies showed small scale (
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/209/1/012022