Fabrication of a microlens array in BK7 through laser ablation and thermal treatment techniques

We propose a laser-based method for fabricating microlens on borosilicate glass substrates. The technique is composed by a laser direct-write technique using a Nd : YVO4 for fabricating the microlens arrays and a post thermal treatment with a CO2 laser for improving its morphological and optical pro...

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Veröffentlicht in:Journal of physics. Conference series 2015-04, Vol.605 (1), p.12023
Hauptverfasser: Blanco, M, Nieto, D, Flores-Arias, M T
Format: Artikel
Sprache:eng
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Zusammenfassung:We propose a laser-based method for fabricating microlens on borosilicate glass substrates. The technique is composed by a laser direct-write technique using a Nd : YVO4 for fabricating the microlens arrays and a post thermal treatment with a CO2 laser for improving its morphological and optical properties. The proposed technique will allow us to obtain microlenses with a broad range of diameters (50μm-500μm) and focal lengths (1mm-5mm). By combining laser direct-write and the thermal treatment assisted by a CO2 laser, we are able to obtain good quality elements.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/605/1/012023