Three-axis MEMS Accelerometer for Structural Inspection
Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simul...
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| Veröffentlicht in: | Journal of physics. Conference series 2016-01, Vol.671 (1), p.12003 |
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| container_title | Journal of physics. Conference series |
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| creator | Barbin, E Koleda, A Nesterenko, T Vtorushin, S |
| description | Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simulate the behavior of MEMS accelerometer by employing a finite element model and MATLAB Simulink tools for modeling nonlinear dynamic systems. |
| doi_str_mv | 10.1088/1742-6596/671/1/012003 |
| format | Article |
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| ispartof | Journal of physics. Conference series, 2016-01, Vol.671 (1), p.12003 |
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| source | IOP Publishing Free Content; Institute of Physics IOPscience extra; EZB-FREE-00999 freely available EZB journals; Alma/SFX Local Collection; Free Full-Text Journals in Chemistry |
| subjects | Accelerometers CAD Computer aided design Dynamical systems Finite element method Inspection Mathematical models Microelectromechanical systems Nonlinear dynamics Nonlinear systems Physics Three axis Vibration analysis |
| title | Three-axis MEMS Accelerometer for Structural Inspection |
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