Three-axis MEMS Accelerometer for Structural Inspection

Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simul...

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Veröffentlicht in:	Journal of physics. Conference series 2016-01, Vol.671 (1), p.12003
Hauptverfasser:	Barbin, E, Koleda, A, Nesterenko, T, Vtorushin, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerometers CAD Computer aided design Dynamical systems Finite element method Inspection Mathematical models Microelectromechanical systems Nonlinear dynamics Nonlinear systems Physics Three axis Vibration analysis
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Beschreibung
Zusammenfassung:	Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simulate the behavior of MEMS accelerometer by employing a finite element model and MATLAB Simulink tools for modeling nonlinear dynamic systems.
ISSN:	1742-6588 1742-6596
DOI:	10.1088/1742-6596/671/1/012003