Physical basis of the device for surface cleanliness measurement

Physical basis of the device for surface cleanliness measurement

The physical model of the device for surface cleanliness measurement and its technical realization are being considered in this paper. The number of gas monolayers being sorbed on the experimental surfaces is considered as a cleanliness parameter of these surfaces. The calibration graphs for the dev...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of physics. Conference series 2017-07, Vol.872 (1), p.12051
Hauptverfasser: Gavriushin, S S, Poliakov, V B, Prokhorov, E P, Deulin, E A
Format: Artikel
Sprache:eng
Schlagworte:
Cleanliness
Physics
Relative humidity
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The physical model of the device for surface cleanliness measurement and its technical realization are being considered in this paper. The number of gas monolayers being sorbed on the experimental surfaces is considered as a cleanliness parameter of these surfaces. The calibration graphs for the device under variable conditions of gases residual pressure, temperature and relative humidity are shown.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/872/1/012051