Energy & mass-charge distribution peculiarities of ion emitted from penning source

The optimization of hydrogen Penning sources used, in particular, in plasma chemical processing of materials and DLC deposition, is still very important. Investigations of mass-charge composition of these ion source emitted beams are particular relevant for miniature linear accelerators (neutron flux generators) nowadays. The Penning ion source energy and mass-charge ion distributions are presented. The relation between the discharge current abrupt jumps with increasing plasma density in the discharge center and increasing potential whipping (up to 50% of the anode voltage) is shown. Also the energy spectra in the discharge different modes as the pressure and anode potential functions are presented. It has been revealed that the atomic hydrogen ion concentration is about 5-10%, and it weakly depends on the pressure and the discharge current (in the investigated range from 1 to 10 mTorr and from 50 to 1000 μA) and increases with the anode voltage (up 1 to 3,5 kV).