A Silicon MEMS EM vibration energy harvester

This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The h...

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Veröffentlicht in:	Journal of physics. Conference series 2019-11, Vol.1407 (1), p.12022
Hauptverfasser:	Yang, Y., Radhakrishna, U., Ward, D., Chandrakasan, A. P., Lang, J. H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Coils Energy harvesting Load matching Magnets Microscopes Open circuit voltage Optimization Physics Silicon Three dimensional printing Vibration monitoring
Online-Zugang:	Volltext
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