A Silicon MEMS EM vibration energy harvester
This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The h...
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Veröffentlicht in: | Journal of physics. Conference series 2019-11, Vol.1407 (1), p.12022 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The harvester is designed to operate near 50 Hz with 0.5-1 g vibrations using a long-stroke suspension. Multi-domain harvester optimization results in an open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a matched-load power-output density of 1.23 mW/cm3 at 1.1 g with a resonance frequency of 76.3 Hz. |
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ISSN: | 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/1407/1/012022 |