Beam plasma discharge in technologies of materials for nanoelectronics

Beam plasma discharge in technologies of materials for nanoelectronics

The technologies developed at V.A. Kotelnikov Institute of Radio Engineering and Electronics of RAS for specific application in nanoelectronics that are not used in industry are reviewed. Physical problems that were been solved at their development are analyzed, and found solutions are represented....

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Veröffentlicht in:Journal of physics. Conference series 2019-11, Vol.1393 (1), p.12058
1. Verfasser: Shustin, E G
Format: Artikel
Sprache:eng
Schlagworte:
Nanoelectronics
Physics
Plasma jets
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Beschreibung
Zusammenfassung:The technologies developed at V.A. Kotelnikov Institute of Radio Engineering and Electronics of RAS for specific application in nanoelectronics that are not used in industry are reviewed. Physical problems that were been solved at their development are analyzed, and found solutions are represented. Tested applications are briefly described.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1393/1/012058