The change in the elastic modulus values for the thickness of a multilayer coating based on TiN and CrN layers

The results of investigations the cross section microstructure of a multilayer coating with a thickness of about 6 μm obtained by cathode arc evaporation, are presented. The top layer of the coating is TiN with a thickness of 200 nm, and the base consists of alternating layers of CrN and CrCN with a...

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Veröffentlicht in:Journal of physics. Conference series 2019-07, Vol.1281 (1), p.12045
Hauptverfasser: Kuznetsova, T A, Lapitskaya, V A, Shabliuk, A V, Warcholinski, B, Gilewicz, A, Chizhik, S A, Aizikovich, S M, Mitrin, B I, Krenev, L I
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Sprache:eng
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Zusammenfassung:The results of investigations the cross section microstructure of a multilayer coating with a thickness of about 6 μm obtained by cathode arc evaporation, are presented. The top layer of the coating is TiN with a thickness of 200 nm, and the base consists of alternating layers of CrN and CrCN with a thickness of 200 nm per layer. Microhardness (H) and elasticity modulus of (E) were measured on the coating surface, on the CrN / CrCN layer surface, and over the cross section of the coating by nanoindentation (NI). It is established that the E values gradient from the surface with E = 313 GPa to the substrate with E = 176 GPa is smooth. The critical load of adhesive strength of the coating determined in the scratch test was 120 N.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1281/1/012045