Research methods of IR-range DOE
A set of methods for studying diffractive optical elements (DOE) operating in the far infrared region and the parameters of the radiation formed by them has been proposed. The results of optical surface defects local controlfor DOEs with binary and semitone reliefobtained by non-contact methods have...
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Veröffentlicht in: | Journal of physics. Conference series 2018-12, Vol.1096 (1), p.12134 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | A set of methods for studying diffractive optical elements (DOE) operating in the far infrared region and the parameters of the radiation formed by them has been proposed. The results of optical surface defects local controlfor DOEs with binary and semitone reliefobtained by non-contact methods have been presented. Approbation of the panoramic diagnostics methodfor determiningparameters of laser beam transformed by DOE has been carried out. |
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ISSN: | 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/1096/1/012134 |