Size effects in LiNbO3 thin films fabricated by pulsed laser deposition

This paper shows the results of the study of size effects of electro-physical parameters in nanostructured LiNbO3 thin films fabricated by pulsed laser deposition. Obtained results shown that with an increase in the number of laser pulses from 50 000 to 150 000, the maximum value of the amplitudes (psi) increases from 36 to 47, and phase shift (delta) varies from 160 to 175. It was found that with increasing of the film thickness from 45.3 to 192.9 nm, charge carrier concentration in the films increasing from 4.1·1012 to 8.75·1012 cm−3. An increase in the grain diameter from 118 to 172 nm causes a gradual increase in charge carriers mobility from 125.714 to 505.841 cm2/V·s.