Application of line-intensity-ratio method for measurement of electron temperature of radio-frequency plasma of argon in magnetic field inside the plasma separator

The buffer plasma in plasma separator of substances must not lead to an additional ionization of ions to be separated, therefore it is needed to monitor its electron temperature. For this purpose an emission line-ratio method was used. In the paper optical diagnostic of argon rf-plasma (f ≈ 5 MHz) in magnetic field (130 and 650 G) was carried out. Argon pressure was of 5 mTorr. Corona model was used for the description of emission processes in plasma. Radial distribution of electron temperature was obtained using measured intensities of 763.5 and 811.5 nm argon emission lines. For data reprocessing the excitation from the ground state and metastable levels was taken into account. The obtained results are in agreement with data, measured from a double probe.