Measurement of six degree motion error of linear stage

In this paper, we propose measurement system of the six degree of motion errors which is based on distance measurement by the laser interferometer. The system has six parallel laser beams and six corner cube mirrors on the linear stage, which reflect the corresponding laser beams. The error of axial...

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Veröffentlicht in:	IOP conference series. Materials Science and Engineering 2017-06, Vol.211 (1), p.12001
1. Verfasser:	Furutani, Ryoshu
Format:	Artikel
Sprache:	eng
Schlagworte:	Distance measurement Error analysis Interferometers Laser beams Lasers Measurement methods Pitch (inclination) Rolling motion Yaw
Online-Zugang:	Volltext
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