Measurement of six degree motion error of linear stage

In this paper, we propose measurement system of the six degree of motion errors which is based on distance measurement by the laser interferometer. The system has six parallel laser beams and six corner cube mirrors on the linear stage, which reflect the corresponding laser beams. The error of axial direction is measured with the ordinary distance measurement method by laser interferometer. The vertical errors to the axial direction and the roll errors are measured by tilted beams using the wedge prism. The pitch and yaw errors are measured by the difference between distance of two corner cube mirrors. The experimental layout of the corner cube mirrors and the other optical devices are shown. As a result, the resolution of 66.5 nm for error of the axial direction, the resolution of 383 nm for the vertical errors to the axial direction, the resolution of 1.23 arc-sec for the roll error and the resolution of 0.429 arc-sec for the pitch and yaw errors are obtained in this system.