Design and analysis of a 3D Elliptical Micro-Displacement Motion Stage

Micro-displacement motion stage driven by piezoelectric actuator has a significant demand in the field of ultra-precision machining in recent years, while the design of micro-displacement motion stage plays an important role to realize a large displacement output and high precision control. Thus, a 3D elliptical micro-displacement motion stage driven by three PZT actuators has been developed. Firstly, the 3D elliptical trajectory of this motion stage could be adjusted through the form of the PZT actuators input signal. Then, the desired trajectory was obtained by adjusting the micro displacement of the motion stage in 3D elliptical space. Finally, the trajectory simulation and the finite element simulation were applied in this motion stage. The experimental results shown that, the output displacement of the three directions under the input force of the 1600N were 14μm, 16μm and 74μm, respectively. And the first three modes were 1471.6Hz, 2698.4Hz and 2803.4Hz, respectively. Analysis and experiments were carried out to verify the performance, result proved that a large output displacement and high precision control could be obtained.