Multilayered nanocrystalline CrN/TiAlN/MoS2 tribological thin film coatings: preparation and characterization
Nanocrystalline multilayer thin film coatings, composed of nanometer-scale thick CrN, TiAlN and MoS2 tri-layer systems, were prepared by reactive co-sputtering processes. The self-lubricated multilayer coating structures were deposited by one-fold oscillating movement of substrates in front of the s...
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| creator | Papp, S Kelemen, A Jakab-Farkas, L Vida-Simiti, I Biró, D |
| description | Nanocrystalline multilayer thin film coatings, composed of nanometer-scale thick CrN, TiAlN and MoS2 tri-layer systems, were prepared by reactive co-sputtering processes. The self-lubricated multilayer coating structures were deposited by one-fold oscillating movement of substrates in front of the sputter sources. Three independently operated direct current (dc) excited unbalanced magnetrons (UM) with rectangular cathodes of TiAl alloy (50/50%), pure chromium and MoS2 were used as sputter sources. The reactive sputtering process was performed in a mixture of Ar-N2 atmosphere. Hardened high-speed-steel (HSS) and thin oxide covered Si (100) wafers were used as substrates for tribological- and microstructure investigations, respectively. According to results of the chemical composition evaluated by Auger-electron spectroscopy (AES) and microstructure investigation by cross sectional transmission electron microscopy (XTEM), the CrN, TiAlN and the MoS2 phases form practically continuous layers with large gradient transition of composition. The as-deposited CrN/ (Al,Ti)N/MoS2 coatings have shown good friction behaviour, tested at room temperature in dry sliding condition with a ball-on-disk tribometer. |
| doi_str_mv | 10.1088/1757-899X/47/1/012016 |
| format | Conference Proceeding |
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The self-lubricated multilayer coating structures were deposited by one-fold oscillating movement of substrates in front of the sputter sources. Three independently operated direct current (dc) excited unbalanced magnetrons (UM) with rectangular cathodes of TiAl alloy (50/50%), pure chromium and MoS2 were used as sputter sources. The reactive sputtering process was performed in a mixture of Ar-N2 atmosphere. Hardened high-speed-steel (HSS) and thin oxide covered Si (100) wafers were used as substrates for tribological- and microstructure investigations, respectively. According to results of the chemical composition evaluated by Auger-electron spectroscopy (AES) and microstructure investigation by cross sectional transmission electron microscopy (XTEM), the CrN, TiAlN and the MoS2 phases form practically continuous layers with large gradient transition of composition. The as-deposited CrN/ (Al,Ti)N/MoS2 coatings have shown good friction behaviour, tested at room temperature in dry sliding condition with a ball-on-disk tribometer.</description><identifier>ISSN: 1757-8981</identifier><identifier>EISSN: 1757-899X</identifier><identifier>DOI: 10.1088/1757-899X/47/1/012016</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Chemical composition ; Chromium nitride ; Coatings ; Direct current ; Hardening rate ; Intermetallic compounds ; Magnetrons ; Microstructure ; Molybdenum disulfide ; Multilayers ; Nanocrystals ; Room temperature ; Self lubrication ; Sputtering ; Thin film coatings ; Thin films ; Titanium base alloys ; Tribology</subject><ispartof>IOP conference series. Materials Science and Engineering, 2013, Vol.47 (1)</ispartof><rights>2013. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). 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Materials Science and Engineering</title><description>Nanocrystalline multilayer thin film coatings, composed of nanometer-scale thick CrN, TiAlN and MoS2 tri-layer systems, were prepared by reactive co-sputtering processes. The self-lubricated multilayer coating structures were deposited by one-fold oscillating movement of substrates in front of the sputter sources. Three independently operated direct current (dc) excited unbalanced magnetrons (UM) with rectangular cathodes of TiAl alloy (50/50%), pure chromium and MoS2 were used as sputter sources. The reactive sputtering process was performed in a mixture of Ar-N2 atmosphere. Hardened high-speed-steel (HSS) and thin oxide covered Si (100) wafers were used as substrates for tribological- and microstructure investigations, respectively. According to results of the chemical composition evaluated by Auger-electron spectroscopy (AES) and microstructure investigation by cross sectional transmission electron microscopy (XTEM), the CrN, TiAlN and the MoS2 phases form practically continuous layers with large gradient transition of composition. The as-deposited CrN/ (Al,Ti)N/MoS2 coatings have shown good friction behaviour, tested at room temperature in dry sliding condition with a ball-on-disk tribometer.</description><subject>Chemical composition</subject><subject>Chromium nitride</subject><subject>Coatings</subject><subject>Direct current</subject><subject>Hardening rate</subject><subject>Intermetallic compounds</subject><subject>Magnetrons</subject><subject>Microstructure</subject><subject>Molybdenum disulfide</subject><subject>Multilayers</subject><subject>Nanocrystals</subject><subject>Room temperature</subject><subject>Self lubrication</subject><subject>Sputtering</subject><subject>Thin film coatings</subject><subject>Thin films</subject><subject>Titanium base alloys</subject><subject>Tribology</subject><issn>1757-8981</issn><issn>1757-899X</issn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2013</creationdate><recordtype>conference_proceeding</recordtype><sourceid>BENPR</sourceid><recordid>eNo9jUtLAzEYRYMoWKs_QQi4HufLa5JxV4ovaOvCCu5KJpNpU9JkzKSL-ustKl3de87iXoRuCdwTUKokUshC1fVnyWVJSiAUSHWGRid_fuqKXKKrYdgCVJJzGKHdfO-z8_pgk21x0CGadBiy9t4Fi6dpUS7dxC_KeXynOCfXRB_XzmiP88YF3Dm_wybq7MJ6eMB9sr1OR4oB69BiszmSyTa57195jS467Qd7859j9PH0uJy-FLO359fpZFb0lEEuKlAdJboyXIquMYRww4xignHJBOm4kaJloBjRnbS8aRiwWlS1gpoyJaxgY3T3t9un-LW3Q15t4z6F4-WKiorVVBAF7AexYlx8</recordid><startdate>20130101</startdate><enddate>20130101</enddate><creator>Papp, S</creator><creator>Kelemen, A</creator><creator>Jakab-Farkas, L</creator><creator>Vida-Simiti, I</creator><creator>Biró, D</creator><general>IOP Publishing</general><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>KB.</scope><scope>L6V</scope><scope>M7S</scope><scope>PDBOC</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope></search><sort><creationdate>20130101</creationdate><title>Multilayered nanocrystalline CrN/TiAlN/MoS2 tribological thin film coatings: preparation and characterization</title><author>Papp, S ; Kelemen, A ; Jakab-Farkas, L ; Vida-Simiti, I ; Biró, D</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p230t-608f21a6c475fbc114c3c835347351f4c75d30831af7e4bb30395698092385e53</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Chemical composition</topic><topic>Chromium nitride</topic><topic>Coatings</topic><topic>Direct current</topic><topic>Hardening rate</topic><topic>Intermetallic compounds</topic><topic>Magnetrons</topic><topic>Microstructure</topic><topic>Molybdenum disulfide</topic><topic>Multilayers</topic><topic>Nanocrystals</topic><topic>Room temperature</topic><topic>Self lubrication</topic><topic>Sputtering</topic><topic>Thin film coatings</topic><topic>Thin films</topic><topic>Titanium base alloys</topic><topic>Tribology</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Papp, S</creatorcontrib><creatorcontrib>Kelemen, A</creatorcontrib><creatorcontrib>Jakab-Farkas, L</creatorcontrib><creatorcontrib>Vida-Simiti, I</creatorcontrib><creatorcontrib>Biró, D</creatorcontrib><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Materials Science Database</collection><collection>ProQuest Engineering Collection</collection><collection>Engineering Database</collection><collection>Materials Science Collection</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Papp, S</au><au>Kelemen, A</au><au>Jakab-Farkas, L</au><au>Vida-Simiti, I</au><au>Biró, D</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Multilayered nanocrystalline CrN/TiAlN/MoS2 tribological thin film coatings: preparation and characterization</atitle><btitle>IOP conference series. Materials Science and Engineering</btitle><date>2013-01-01</date><risdate>2013</risdate><volume>47</volume><issue>1</issue><issn>1757-8981</issn><eissn>1757-899X</eissn><abstract>Nanocrystalline multilayer thin film coatings, composed of nanometer-scale thick CrN, TiAlN and MoS2 tri-layer systems, were prepared by reactive co-sputtering processes. The self-lubricated multilayer coating structures were deposited by one-fold oscillating movement of substrates in front of the sputter sources. Three independently operated direct current (dc) excited unbalanced magnetrons (UM) with rectangular cathodes of TiAl alloy (50/50%), pure chromium and MoS2 were used as sputter sources. The reactive sputtering process was performed in a mixture of Ar-N2 atmosphere. Hardened high-speed-steel (HSS) and thin oxide covered Si (100) wafers were used as substrates for tribological- and microstructure investigations, respectively. According to results of the chemical composition evaluated by Auger-electron spectroscopy (AES) and microstructure investigation by cross sectional transmission electron microscopy (XTEM), the CrN, TiAlN and the MoS2 phases form practically continuous layers with large gradient transition of composition. The as-deposited CrN/ (Al,Ti)N/MoS2 coatings have shown good friction behaviour, tested at room temperature in dry sliding condition with a ball-on-disk tribometer.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/1757-899X/47/1/012016</doi><oa>free_for_read</oa></addata></record> |
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| source | Institute of Physics IOPscience extra; IOP Publishing Free Content; EZB-FREE-00999 freely available EZB journals; Free Full-Text Journals in Chemistry |
| subjects | Chemical composition Chromium nitride Coatings Direct current Hardening rate Intermetallic compounds Magnetrons Microstructure Molybdenum disulfide Multilayers Nanocrystals Room temperature Self lubrication Sputtering Thin film coatings Thin films Titanium base alloys Tribology |
| title | Multilayered nanocrystalline CrN/TiAlN/MoS2 tribological thin film coatings: preparation and characterization |
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