Photovoltaic intelligent gas sensors for the detection of acetone concentration over a wide range of measurement for biomedical applications and tasks of public safety

This report presents experimental studies of electrical changes in photovoltaic sensitive elements based on a Por-Si: c-Si heterojunction during the adsorption of acetone molecules in a mixture of pure nitrogen. The porous silicon layer was formed by electrochemical etching on a p-type silicon wafer. The obtained samples were subjected to additional plasma-chemical treatment using hydrogen and fluoride ions after fabrication. Such surface treatment has a stabilizing effect on the electrical properties of the material and increases their adsorption sensitivity to polar molecules. The developed technology allows you to automatically change the sensitivity of photovoltaic sensors during the experiment, depending on the concentration of acetone. These photovoltaic sensors are able to expand the range of measured concentrations from 1 ppm to 10 vol%.