Active vibration isolation of nanotechnology equipment

The paper is concerned with the results of experimental studies of the parameters of transients during the operation of a high-precision drive based on a magnetorheological (MR) elastomer with a closed control system, which is also an active damper. In this paper, the authors showed the amplitude an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	IOP conference series. Materials Science and Engineering 2020-01, Vol.709 (4), p.44046
Hauptverfasser:	Mikhailov, V P, Bazinenkov, A M, Kazakov, A V
Format:	Artikel
Sprache:	eng
Schlagworte:	Active damping Elastomers Nanotechnology Outgassing Semiactive damping Semiactive vibration isolators Surface layers Vibration isolators
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!