Active vibration isolation of nanotechnology equipment

The paper is concerned with the results of experimental studies of the parameters of transients during the operation of a high-precision drive based on a magnetorheological (MR) elastomer with a closed control system, which is also an active damper. In this paper, the authors showed the amplitude and frequency characteristics of the damper and vibration-isolating platform in semi-active mode and presented a model of outgassing from the near-surface layer of MR elastomer. The results of studies on the partial composition of gases released from the MR elastomer at the temperature 150°C are given, depending on the pumping time.