Active vibration isolation of nanotechnology equipment

Active vibration isolation of nanotechnology equipment

The paper is concerned with the results of experimental studies of the parameters of transients during the operation of a high-precision drive based on a magnetorheological (MR) elastomer with a closed control system, which is also an active damper. In this paper, the authors showed the amplitude an...

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Veröffentlicht in:IOP conference series. Materials Science and Engineering 2020-01, Vol.709 (4), p.44046
Hauptverfasser: Mikhailov, V P, Bazinenkov, A M, Kazakov, A V
Format: Artikel
Sprache:eng
Schlagworte:
Active damping
Elastomers
Nanotechnology
Outgassing
Semiactive damping
Semiactive vibration isolators
Surface layers
Vibration isolators
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Bazinenkov, A M
Kazakov, A V
description The paper is concerned with the results of experimental studies of the parameters of transients during the operation of a high-precision drive based on a magnetorheological (MR) elastomer with a closed control system, which is also an active damper. In this paper, the authors showed the amplitude and frequency characteristics of the damper and vibration-isolating platform in semi-active mode and presented a model of outgassing from the near-surface layer of MR elastomer. The results of studies on the partial composition of gases released from the MR elastomer at the temperature 150°C are given, depending on the pumping time.
doi_str_mv 10.1088/1757-899X/709/4/044046
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subjects Active damping
Elastomers
Nanotechnology
Outgassing
Semiactive damping
Semiactive vibration isolators
Surface layers
Vibration isolators
title Active vibration isolation of nanotechnology equipment
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