Advanced technologies of microlenses production for robot system camcorders
The processes of formation of microlenses in photosensitive silicate and germanate glasses have been studied. A series of successive operations with samples of photosensitive glass activated by silver and cerium ions: irradiation, photolithography, secondary heat treatment, diffusion and ion exchang...
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Veröffentlicht in: | IOP conference series. Earth and environmental science 2017-10, Vol.87 (9), p.92014 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The processes of formation of microlenses in photosensitive silicate and germanate glasses have been studied. A series of successive operations with samples of photosensitive glass activated by silver and cerium ions: irradiation, photolithography, secondary heat treatment, diffusion and ion exchange lead to the formation of various profiles on the glass surface, including convex or concave lens surfaces. On the basis of this effect, a promising technology for the production of raster microlenses and lenses for various optical devices and video cameras of a robotic system was developed. |
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ISSN: | 1755-1307 1755-1315 |
DOI: | 10.1088/1755-1315/87/9/092014 |