Determination of heat fluxes and surface temperatures during magnetron sputtering with a cold and hot target

The method of calculation of heat fluxes and surface temperatures during magnetron sputtering of cold and hot targets developed from using the algebraic method for calculating radiant fluxes is presented, which allows to predict the required power characteristics for obtaining the desired temperatur...

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Veröffentlicht in:	IOP conference series. Materials Science and Engineering 2018-07, Vol.387 (1), p.12010
1. Verfasser:	Bychkov, S P
Format:	Artikel
Sprache:	eng
Schlagworte:	Heat flux Heat transfer Magnetron sputtering Radiant flux Substrates Surface temperature
Online-Zugang:	Volltext
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