Membrane-capacitive transducer with compensation for the primary standard of pressure
The paper discusses improvements for the primary vacuum-meter transducer for measuring absolute pressure in a wide range from 0.1 to 10 Pa.
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| Veröffentlicht in: | IOP conference series. Materials Science and Engineering 2018-07, Vol.387 (1), p.12002 |
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| container_issue | 1 |
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| container_title | IOP conference series. Materials Science and Engineering |
| container_volume | 387 |
| creator | Andronov, I V Gorobey, V N Izrailov, E K Kuvandykov, R E Lobashev, A A Chernyshenko, A A |
| description | The paper discusses improvements for the primary vacuum-meter transducer for measuring absolute pressure in a wide range from 0.1 to 10 Pa. |
| doi_str_mv | 10.1088/1757-899X/387/1/012002 |
| format | Article |
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| identifier | ISSN: 1757-8981 |
| ispartof | IOP conference series. Materials Science and Engineering, 2018-07, Vol.387 (1), p.12002 |
| issn | 1757-8981 1757-899X |
| language | eng |
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| source | Institute of Physics IOPscience extra; IOP Publishing Free Content; Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals; Free Full-Text Journals in Chemistry |
| subjects | Pressure |
| title | Membrane-capacitive transducer with compensation for the primary standard of pressure |
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