Membrane-capacitive transducer with compensation for the primary standard of pressure

Membrane-capacitive transducer with compensation for the primary standard of pressure

The paper discusses improvements for the primary vacuum-meter transducer for measuring absolute pressure in a wide range from 0.1 to 10 Pa.

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Veröffentlicht in:IOP conference series. Materials Science and Engineering 2018-07, Vol.387 (1), p.12002
Hauptverfasser: Andronov, I V, Gorobey, V N, Izrailov, E K, Kuvandykov, R E, Lobashev, A A, Chernyshenko, A A
Format: Artikel
Sprache:eng
Schlagworte:
Pressure
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Zusammenfassung:The paper discusses improvements for the primary vacuum-meter transducer for measuring absolute pressure in a wide range from 0.1 to 10 Pa.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/387/1/012002