Temperature-dependent Raman and photoluminescence of β-Ga2O3 doped with shallow donors and deep acceptors impurities

•The ion doping of β-Ga2O3 with shallow donor Si and deep acceptor Mg impurities is conducted using EFG method.•The temperature-dependent Raman spectra of β-Ga2O3 doped with shallow donor and deep acceptor impurities are explored.•Study on temperature-dependent PL caused by doping of shallow donor Si and deep acceptor Mg impurities. Ion doping technology with precise control of doping concentration and configuration can optimize the performance of β-phase gallium oxide (β-Ga2O3) high-power electronic and optoelectronic devices. In this work, shallow-donor Si and deep-acceptor Mg impurities are doped in β-Ga2O3 separately using edge-defined film-fed growth (EFG) method. Laser scanning confocal microscopy and X-ray diffraction analyses show that the as-grown un/Si/Mg-doped β-Ga2O3 substrates have superior qualities such as smooth surface, homogenous phase, and high crystallinity. Raman spectroscopy analysis indicate that the Raman shift and full width at half-maximum (FWHM) has a linear relationship with temperature in the range of 77–297 K. The temperature-variable photoluminescence (PL) spectroscopy suggests that the Si doping introduces less damage to the β-Ga2O3 lattice structure and the Si-doped sample has higher stability at different temperatures, however, the local atomic configurations of Mg impurities can be more easily/significantly affected by temperature. The work can offer an insightful reference to applications of ion-doped β-Ga2O3 optoelectronic devices.