Modeling of a bimetallic MEMS-based infrared detector

Modeling of a bimetallic MEMS-based infrared detector

In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capaciti...

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Veröffentlicht in:IOP conference series. Materials Science and Engineering 2018-01, Vol.289 (1), p.12022
Hauptverfasser: Ph Pevtsov, E, Breev, S V, Demenkova, T A
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Sprache:eng
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Bimetals
Infrared detectors
Parameter sensitivity
Sensors
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Demenkova, T A
description In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capacitive MEMS-receivers on basis of bimetallic effect as an alternative to pyroelectric and microbolometer IR detectors is shown.
doi_str_mv 10.1088/1757-899X/289/1/012022
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fullrecord <record><control><sourceid>proquest_iop_j</sourceid><recordid>TN_cdi_proquest_journals_2556531149</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2556531149</sourcerecordid><originalsourceid>FETCH-LOGICAL-c354t-afac1c35eda630155727643326f964be2d2cf971e728185dad3e72036f87413a3</originalsourceid><addsrcrecordid>eNqFkE9Lw0AQxRdRsFa_ggS8eInZ2f85SqlVaPBQBW_LNrsrKWkTd9OD394tkYogeJoH83tvmIfQNeA7wEoVILnMVVm-FUSVBRQYCCbkBE2Oi9OjVnCOLmLcYCwkY3iCeNVZ1za796zzmcnWzdYNpm2bOqvm1Spfm-hs1ux8MCEJ6wZXD124RGfetNFdfc8pen2Yv8we8-Xz4ml2v8xrytmQG29qSNJZIygGziWRglFKhC8FWztiSe1LCU4SBYpbY2mSmAqvJANq6BTdjLl96D72Lg560-3DLp3UhHPBKQArEyVGqg5djMF53Ydma8KnBqwPFenD9_rQhE4VadBjRcl4Oxqbrv9JrlbzX5jurU8o-QP9J_8LQABzcQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2556531149</pqid></control><display><type>article</type><title>Modeling of a bimetallic MEMS-based infrared detector</title><source>Institute of Physics IOPscience extra</source><source>IOP Publishing Free Content</source><source>Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals</source><source>Free Full-Text Journals in Chemistry</source><creator>Ph Pevtsov, E ; Breev, S V ; Demenkova, T A</creator><creatorcontrib>Ph Pevtsov, E ; Breev, S V ; Demenkova, T A</creatorcontrib><description>In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capacitive MEMS-receivers on basis of bimetallic effect as an alternative to pyroelectric and microbolometer IR detectors is shown.</description><identifier>ISSN: 1757-8981</identifier><identifier>EISSN: 1757-899X</identifier><identifier>DOI: 10.1088/1757-899X/289/1/012022</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Bimetals ; Infrared detectors ; Parameter sensitivity ; Sensors</subject><ispartof>IOP conference series. Materials Science and Engineering, 2018-01, Vol.289 (1), p.12022</ispartof><rights>Published under licence by IOP Publishing Ltd</rights><rights>2018. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c354t-afac1c35eda630155727643326f964be2d2cf971e728185dad3e72036f87413a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/1757-899X/289/1/012022/pdf$$EPDF$$P50$$Giop$$Hfree_for_read</linktopdf><link.rule.ids>314,776,780,27901,27902,38845,38867,53815,53842</link.rule.ids></links><search><creatorcontrib>Ph Pevtsov, E</creatorcontrib><creatorcontrib>Breev, S V</creatorcontrib><creatorcontrib>Demenkova, T A</creatorcontrib><title>Modeling of a bimetallic MEMS-based infrared detector</title><title>IOP conference series. Materials Science and Engineering</title><addtitle>IOP Conf. Ser.: Mater. Sci. Eng</addtitle><description>In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capacitive MEMS-receivers on basis of bimetallic effect as an alternative to pyroelectric and microbolometer IR detectors is shown.</description><subject>Bimetals</subject><subject>Infrared detectors</subject><subject>Parameter sensitivity</subject><subject>Sensors</subject><issn>1757-8981</issn><issn>1757-899X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><sourceid>O3W</sourceid><sourceid>BENPR</sourceid><recordid>eNqFkE9Lw0AQxRdRsFa_ggS8eInZ2f85SqlVaPBQBW_LNrsrKWkTd9OD394tkYogeJoH83tvmIfQNeA7wEoVILnMVVm-FUSVBRQYCCbkBE2Oi9OjVnCOLmLcYCwkY3iCeNVZ1za796zzmcnWzdYNpm2bOqvm1Spfm-hs1ux8MCEJ6wZXD124RGfetNFdfc8pen2Yv8we8-Xz4ml2v8xrytmQG29qSNJZIygGziWRglFKhC8FWztiSe1LCU4SBYpbY2mSmAqvJANq6BTdjLl96D72Lg560-3DLp3UhHPBKQArEyVGqg5djMF53Ydma8KnBqwPFenD9_rQhE4VadBjRcl4Oxqbrv9JrlbzX5jurU8o-QP9J_8LQABzcQ</recordid><startdate>20180101</startdate><enddate>20180101</enddate><creator>Ph Pevtsov, E</creator><creator>Breev, S V</creator><creator>Demenkova, T A</creator><general>IOP Publishing</general><scope>O3W</scope><scope>TSCCA</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>KB.</scope><scope>L6V</scope><scope>M7S</scope><scope>PDBOC</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope></search><sort><creationdate>20180101</creationdate><title>Modeling of a bimetallic MEMS-based infrared detector</title><author>Ph Pevtsov, E ; Breev, S V ; Demenkova, T A</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c354t-afac1c35eda630155727643326f964be2d2cf971e728185dad3e72036f87413a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Bimetals</topic><topic>Infrared detectors</topic><topic>Parameter sensitivity</topic><topic>Sensors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ph Pevtsov, E</creatorcontrib><creatorcontrib>Breev, S V</creatorcontrib><creatorcontrib>Demenkova, T A</creatorcontrib><collection>IOP Publishing Free Content</collection><collection>IOPscience (Open Access)</collection><collection>CrossRef</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science &amp; Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Materials Science Database</collection><collection>ProQuest Engineering Collection</collection><collection>Engineering Database</collection><collection>Materials Science Collection</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><jtitle>IOP conference series. Materials Science and Engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ph Pevtsov, E</au><au>Breev, S V</au><au>Demenkova, T A</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Modeling of a bimetallic MEMS-based infrared detector</atitle><jtitle>IOP conference series. Materials Science and Engineering</jtitle><addtitle>IOP Conf. Ser.: Mater. Sci. Eng</addtitle><date>2018-01-01</date><risdate>2018</risdate><volume>289</volume><issue>1</issue><spage>12022</spage><pages>12022-</pages><issn>1757-8981</issn><eissn>1757-899X</eissn><abstract>In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capacitive MEMS-receivers on basis of bimetallic effect as an alternative to pyroelectric and microbolometer IR detectors is shown.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/1757-899X/289/1/012022</doi><tpages>5</tpages><oa>free_for_read</oa></addata></record>
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subjects Bimetals
Infrared detectors
Parameter sensitivity
Sensors
title Modeling of a bimetallic MEMS-based infrared detector
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-11T07%3A52%3A27IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_iop_j&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Modeling%20of%20a%20bimetallic%20MEMS-based%20infrared%20detector&rft.jtitle=IOP%20conference%20series.%20Materials%20Science%20and%20Engineering&rft.au=Ph%20Pevtsov,%20E&rft.date=2018-01-01&rft.volume=289&rft.issue=1&rft.spage=12022&rft.pages=12022-&rft.issn=1757-8981&rft.eissn=1757-899X&rft_id=info:doi/10.1088/1757-899X/289/1/012022&rft_dat=%3Cproquest_iop_j%3E2556531149%3C/proquest_iop_j%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2556531149&rft_id=info:pmid/&rfr_iscdi=true