Modeling of a bimetallic MEMS-based infrared detector

Modeling of a bimetallic MEMS-based infrared detector

In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capaciti...

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Veröffentlicht in:IOP conference series. Materials Science and Engineering 2018-01, Vol.289 (1), p.12022
Hauptverfasser: Ph Pevtsov, E, Breev, S V, Demenkova, T A
Format: Artikel
Sprache:eng
Schlagworte:
Bimetals
Infrared detectors
Parameter sensitivity
Sensors
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Zusammenfassung:In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capacitive MEMS-receivers on basis of bimetallic effect as an alternative to pyroelectric and microbolometer IR detectors is shown.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/289/1/012022