A temperature compensated biaxial eFM accelerometer in Epi-seal process

A temperature compensated biaxial eFM accelerometer in Epi-seal process

[Display omitted] •Biaxial eFM accelerometer with motion decoupling flexure and vacuum-encapsulated at wafer level is proposed and prototyped.•The sensitivity of fabricated FM accelerometer of 45.8 Hz/g with negligible cross-axis sensitivity (12k) free-free beam resonators mitigates the first-order...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2021-10, Vol.330, p.112860, Article 112860
Hauptverfasser: Shin, Seungyong, Kwon, Hyun-Keun, Vukasin, Gabrielle D., Kenny, Thomas W., Ayazi, Farrokh
Format: Artikel
Sprache:eng
Schlagworte:
Accelerometers
Dual axis resonant accelerometer
Epi-seal
Flexing
Frequencies
Frequency modulation
Micro-gravity accelerometer
Q factors
Resonators
Sensitivity
Sensitivity analysis
Sensors
Studies
Temperature
Temperature compensation
Temperature effects
Temperature sensors
Wide bandwidth
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Zusammenfassung:[Display omitted] •Biaxial eFM accelerometer with motion decoupling flexure and vacuum-encapsulated at wafer level is proposed and prototyped.•The sensitivity of fabricated FM accelerometer of 45.8 Hz/g with negligible cross-axis sensitivity (12k) free-free beam resonators mitigates the first-order nonlinearities due to temperature effects and unwanted response to proof-mass spurious modes. The fabricated device measures a scale factor of 45.8 Hz/g with negligible cross-axis sensitivity (
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2021.112860