Analytical Modeling of AIN-Based Film Bulk Acoustic Wave Resonator for Hydrogen sulfide Gas detection Based on PiezoMUMPs

Aluminium nitride (AIN) thin film bulk acoustic resonator (FBAR) sensor for hydrogen sulfide gas detection has been designed and mathematically modelled using CoventorWare and MATLAB software, respectively. The designed FBAR sensor is based on the PiezoMUMPs fabrication technology. The detection principle of the FBAR gas sensor is based on the resonant frequency changes detection due to the mass change on the top electrode of the sensor induced by the absorbed gas molecules by the nanomaterial deposited on the surface of the top electrode device. Reduced graphene oxide hybrid with copper oxide was considered as the sensitive nanomaterials and their mass loaded was evaluated in the theoretically calculation. The resonant frequency of the shear mode of the FBAR sensor has been calculated theoretically and found to be 9.4524 GHz. The effects of the gas molecules on the resonant frequency have been investigated using a mathematical equation and it shown that the increasing of the gas mass on the sensor surface will reduce the sensor resonant frequency. Furthermore, the sensitivity of the sensor was calculated to be 0.22615 Hz/fg.