In situ investigation of nanometric cutting of 3C-SiC using scanning electron microscope

Experimentally revealing the nanometric deformation behavior of 3C-SiC is challenging due to its ultra-small feature size for brittle-to-ductile transition. In the present work, we elucidated the nanometric cutting mechanisms of 3C-SiC by performing in situ nanometric cutting experiments under scann...

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Veröffentlicht in:International journal of advanced manufacturing technology 2021-08, Vol.115 (7-8), p.2299-2312
Hauptverfasser: Tian, Dongyu, Xu, Zongwei, Liu, Lei, Zhou, Zhanqi, Zhang, Junjie, Zhao, Xuesen, Hartmaier, Alexander, Liu, Bing, Song, Le, Luo, Xichun
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Sprache:eng
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