In situ investigation of nanometric cutting of 3C-SiC using scanning electron microscope
Experimentally revealing the nanometric deformation behavior of 3C-SiC is challenging due to its ultra-small feature size for brittle-to-ductile transition. In the present work, we elucidated the nanometric cutting mechanisms of 3C-SiC by performing in situ nanometric cutting experiments under scann...
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Veröffentlicht in: | International journal of advanced manufacturing technology 2021-08, Vol.115 (7-8), p.2299-2312 |
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Sprache: | eng |
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