Nanoindentation of AlN, GaN, and AlGaN films grown by HVPE on SiC/Si hybrid substrates

This paper presents an experimental study of structural and mechanical characteristics of thin films of AlN, GaN, and AlGaN grown on hybrid SiC/Si substrates by the method of HVPE. The surface roughness of the films and substrates has been measured. The thickness and molecular composition of the fil...

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Veröffentlicht in:	Journal of physics. Conference series 2021-06, Vol.1954 (1), p.12009
Hauptverfasser:	Grashchenko, A S, Kukushkin, S A, Osipov, A V, Sharofidinov, Sh Sh
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum gallium nitrides Aluminum nitride Chemical composition Elastic analysis Elastic deformation Ellipsometry Gallium nitrides Mechanical properties Modulus of elasticity Nanoindentation Physics Silicon substrates Surface roughness Thickness measurement Thin films
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